Azizollah Ganji, B., and M. Taybi. “A Novel High Sensitivity MEMS Acoustic Sensor Using Corrugated Diaphragm”. Majlesi Journal of Electrical Engineering, Vol. 11, no. 4, Dec. 2017, pp. 53-57, http://mjee.iaumajlesi.ac.ir/index/index.php/ee/article/view/1776.